Modeling Micro-Mechanical Structures for System Simulations

In contrast to classical object-oriented electromechanical modelling, i.e. describing plates, suspensions, drives etc. [4], this paper proposes combining models of basic physical effects to object models which in turn can be used for system modelling. This allows freely choosing which effects are to be considered for some simulation. Moreover, the development of new object models is simplified. The paper shows how to model a wide variety of electromechanical devices with a well-defined library of basic effects.