Room-temperature electrically pumped InGaN-based microdisk laser grown on Si.

Silicon photonics has been longing for an efficient on-chip light source that is electrically driven at room temperature. Microdisk laser featured with low-loss whispering gallery modes can emit directional lasing beam through a closely coupled on-chip waveguide efficiently, and hence is particularly suitable for photonics integration. The realization of electrically pumped III-nitride microdisk laser grown on Si has been impeded by the conventional undercut structure, poor material quality, and a limited quality of GaN microdisk formed by dry etching. Here we report a successful fabrication of room-temperature electrically pumped InGaN-based microdisk lasers grown on Si. A dramatic narrowing of the electroluminescence spectral line-width and a clear discontinuity in the slope of light output power plotted as a function of the injection current provide an unambiguous evidence of lasing. This is the first observation of electrically pumped lasing in InGaN-based microdisk lasers grown on Si at room temperature.

[1]  Philippe Boucaud,et al.  III-Nitride-on-silicon microdisk lasers from the blue to the deep ultra-violet , 2016 .

[2]  Shuji Nakamura,et al.  The Roles of Structural Imperfections in InGaN-Based Blue Light-Emitting Diodes and Laser Diodes , 1998 .

[3]  Investigation of Light-Induced Deep-Level Defect Activation at the AlN/Si Interface , 2011 .

[4]  Shuji Nakamura,et al.  High-Power, Long-Lifetime InGaN Multi-Quantum-Well-Structure Laser Diodes , 1997 .

[5]  K. Vahala.  Optical microcavities : Photonic technologies , 2003 .

[6]  Shuji Nakamura,et al.  InGaN/GaN/AlGaN-based laser diodes grown on epitaxially laterally overgrown GaN , 1999 .

[7]  James S. Speck,et al.  High-power blue laser diodes with indium tin oxide cladding on semipolar (202¯1¯) GaN substrates , 2015 .

[8]  Cheng Zhang,et al.  Optical Engineering of Modal Gain in a III-Nitride Laser with Nanoporous GaN , 2016 .

[9]  Jinghua Teng,et al.  Lasing in GaN microdisks pivoted on Si , 2006 .

[10]  Y. Maniwa,et al.  Local optical absorption spectra of MoS2 monolayers obtained using scanning near-field optical microscopy measurements , 2016 .

[11]  Xiaoyang Liu,et al.  Facile microwave-assisted synthesis of Zn2GeO4:Mn2+, Yb3+ uniform nanorods and near-infrared down-conversion properties , 2017 .

[12]  Yuk Fai Cheung,et al.  Whispering-gallery mode lasing from optically free-standing InGaN microdisks. , 2014, Optics letters.

[13]  Dabing Li.  GaN-on-Si laser diode: open up a new era of Si-based optical interconnections , 2016 .

[14]  Michael Hochberg,et al.  Towards fabless silicon photonics , 2010 .

[15]  James S. Speck,et al.  Prospects for LED lighting , 2009 .

[16]  Yu-Chieh Chi,et al.  Violet Laser Diode Enables Lighting Communication , 2017, Scientific Reports.

[17]  Hao-Chung Kuo,et al.  Mesoporous GaN for Photonic Engineering-Highly Reflective GaN Mirrors as an Example , 2015 .

[18]  Naoki Kobayashi,et al.  Efficient and high-power AlGaN-based ultraviolet light-emitting diode grown on bulk GaN , 2001 .

[19]  Hui Yang,et al.  Quantum dot vertical-cavity surface-emitting lasers covering the ‘green gap’ , 2016, Light: Science & Applications.

[20]  Masao Ikeda,et al.  High‐power GaN‐based semiconductor lasers , 2004 .

[21]  Jung Min Lee,et al.  Graphene-contact electrically driven microdisk lasers , 2012, Nature Communications.

[22]  Hui Yang,et al.  GaN-on-Si blue/white LEDs: epitaxy, chip, and package , 2016 .

[23]  Qian Sun,et al.  Strain relaxation and dislocation reduction in AlGaN step‐graded buffer for crack‐free GaN on Si (111) , 2014 .

[24]  Yong-Zhen Huang,et al.  Influences of carrier diffusion and radial mode field pattern on high speed characteristics for microring lasers , 2014 .

[25]  Yongjin Wang,et al.  Membrane-type photonic integration of InGaN/GaN multiple-quantum-well diodes and waveguide , 2017 .

[26]  Soo Jin Chua,et al.  Fabrication of deeply undercut GaN-based microdisk structures on silicon platforms , 2007 .

[27]  Shuji Nakamura,et al.  Room-temperature continuous-wave lasing in GaN/InGaN microdisks , 2007 .

[28]  S. Ho,et al.  Optically-pumped ultraviolet microdisk laser on a silicon substrate , 2004, Conference on Lasers and Electro-Optics, 2004. (CLEO)..

[29]  Natalia M. Litchinitser,et al.  Orbital angular momentum microlaser , 2016, Science.

[30]  Shin-ichi Nagahama,et al.  Recent improvement in nitride lasers , 2017, OPTO.

[31]  G. Tränkle,et al.  Effect of ridge waveguide etch depth on laser threshold of InGaN MQW laser diodes , 2012, OPTO.

[32]  Yong-Zhen Huang,et al.  Direct-modulated waveguide-coupled microspiral disk lasers with spatially selective injection for on-chip optical interconnects. , 2014, Optics express.

[33]  B. Liu,et al.  Room temperature continuous–wave green lasing from an InGaN microdisk on silicon , 2014, Scientific Reports.

[34]  Hui Yang,et al.  Room-temperature continuous-wave electrically injected InGaN-based laser directly grown on Si , 2016, Nature Photonics.