An interferometric calorimeter for thin-film thermal diffusivity measurements

We demonstrate that the thermal diffusivity of thin‐film samples bonded to transparent substrates can be measured from the phase lag of thermal waves propagating from the sample surface into the substrate. The thermal waves are detected from the substrate’s interferometrically modulated reflectance. This technique is used to determine the thermal diffusivity of 5‐μm‐thick polymer films.

[1]  H. Coufal,et al.  Thermal diffusivity measurements of thin films with a pyroelectric calorimeter , 1985 .

[2]  A. Boccara,et al.  Photothermal deflection spectroscopy and detection. , 1981, Applied optics.

[3]  A. Mandelis,et al.  Theory of photopyroelectric spectroscopy of solids , 1985 .

[4]  F. Lepoutre,et al.  Photoacoustic Measurements of Thermal Diffusivity. Description of the "Drum Effect" , 1981, Second International Meeting on Photoacoustic Spectroscopy.

[5]  H. K. Wickramasinghe,et al.  A Fabry-Perot acoustic surface vibration detector - application to acoustic holography , 1973 .

[6]  D. Horne,et al.  Pyroelectric calorimeter for photothermal studies of thin films and adsorbates , 1987 .

[7]  H. Coufal,et al.  A pulsed method for thermal-diffusivity measurements of polymer films with submicrometre thickness , 1986 .

[8]  N. A. Patel,et al.  Two‐beam photoacoustic phase measurement of the thermal diffusivity of solids , 1986 .

[9]  Randall T. Swimm,et al.  Photoacoustic determination of thin‐film thermal properties , 1983 .

[10]  S. Dzioba,et al.  Temperature measurements of glass substrates during plasma etching , 1981 .

[11]  R. Melcher,et al.  Measurement of thermal diffusivity using a pyroelectric detector , 1982 .

[12]  D. Guidotti,et al.  Comment on "Spatially resolved defect mapping in semiconductors using laser­ modulated thermoreflectance" , 1985 .

[13]  Albert Claude Boccara,et al.  Photothermal displacement spectroscopy: An optical probe for solids and surfaces , 1983 .

[14]  K. Itoh,et al.  Two-frequency laser interferometer for small displacement measurements in a low frequency range. , 1979, Applied optics.

[15]  G. Busse,et al.  Thermal wave remote and nondestructive inspection of polymers , 1983 .

[16]  Patrick Poulet,et al.  Photoacoustic measurement of thermal properties of a thin polyester film , 1984 .

[17]  G. Eesley,et al.  Transient thermoreflectance from thin metal films , 1986, Annual Meeting Optical Society of America.

[18]  Jon Opsal,et al.  Detection of thermal waves through modulated optical transmittance and modulated optical scattering , 1986 .

[19]  D. Fournier,et al.  Thermal diffusivity measurement of micron-thick semiconductor films by mirage detection , 1987 .

[20]  J. Tauc,et al.  Picosecond interferometric technique for study of phonons in the Brillouin frequency range , 1986 .

[21]  R. Glang,et al.  Handbook of Thin Film Technology , 1970 .

[22]  A. Tam,et al.  Remote sensing applications of pulsed photothermal radiometry , 1983 .

[23]  K. Saenger Interferometric measurement of substrate heating induced by pulsed laser irradiation , 1988 .

[24]  J. Badoz,et al.  Thermo‐optical spectroscopy: Detection by the ’’mirage effect’’ , 1980 .

[25]  N. Amer,et al.  A contactless method for investigating the thermal properties of thin films , 1987 .

[26]  A. Rosencwaig,et al.  Detection of thermal waves through optical reflectance , 1985 .

[27]  O. S. Heavens,et al.  Optical Properties of Thin Solid Films , 2011 .

[28]  A. Rosencwaig,et al.  Thermal-wave detection and thin-film thickness measurements with laser beam deflection. , 1983, Applied optics.

[29]  M. J. Adams,et al.  Analytical optoacoustic spectrometry. Part III. The optoacoustic effect and thermal diffusivity , 1977 .