Fast semiconductor thermoelectric devices

Abstract The parameters of a thermoelectric radiation detector on a Bi 2 Te 3 basis were calculated. Maximum specific detectivity requires a special geometric relation between the receiver area and the thermocouple leg dimensions. To obtain a response time in the millisecond range, thermocouple legs approximately 100 μm long have to be produced. A flash evaporation equipment for the preparation of small thermocouples was developed, allowing the deposition of films up to 200 μm thick. Semiconductor alloys of the system Bi 2 − x Sb x Te 3 + y were used for p- and n-type legs. A microthermocouple with film thickness of 100 μm exhibited a response time of 10 ms when used as a Peltier element.