Dual axis tiltmeter with nanorad resolution based on commercial force compensation weigh cells

High precision measurements and monitoring of tilt or inclination are not only essential in the field of geophysics and geodesy but also in ultraprecise force and mass measurements. We present a new concept for high resolving tilt/ inclination measurements. Thereto a commercial electromagnetic force compensation (EMFC) weigh cell is mounted in a hanging position and loaded with a defined weight. Thus the system conforms to a pendulum. By measuring the tilt depended deflection of the pendulum with the position sensor of the weigh cell we achieved a measuring rage of ± 2 mrad. By operating the pendulum like a hanging balance and compensating the pendulum deflection with the balance internal voice coil a tilt dependent lateral force is measured. In this case the measurement range of the Tiltmeter was extended to ± 9 mrad. In both measurement modes a standard deviation of < 10 nrad (1.5 nrad filtered) within a period of 30 minutes was achieved. Index Terms tiltmeter, inclinometer, electromagnetic force compensation