친환경용 On/Off Diaphragm Valve 개발

Currently, Valves by using Semiconductor & LCD manufacturing process are almost pack-less type They are the valves of seal of grand part type to cover perfectly the leakage of fluid by using bellows and diaphragm instead of the grand packing But they didn't develop in Korea, and also foreign countries don't have enough data of the basic technology Although they have the data, they are almost made by Stainless Still for pneumatic valves. In this paper, It's not as pneumatic valves but fluid (chemical & DI) Valves based on the dates of steel valves which are already commercial use In this paper, the data makes the basic data of Eco - Environmental On/Off Diaphragm valve establish to develop it by ourselves