论文信息 - Replacement metal-gate NMOSFETs with ALD TaN/EP-Cu, PVD Ta, and PVD TaN electrode - 字舞流文

Replacement metal-gate NMOSFETs with ALD TaN/EP-Cu, PVD Ta, and PVD TaN electrode

Bin Yu | Qi Xiang | J. Pan | Ming-Ren Lin | C. Woo | Chih-Yuh Yang | U. Bhandary | S. Guggilla | N. Krishna | Hua Chung | A. Hui