论文信息 - Study of high quality AlN layers grown on Si(111) substrates by plasma-assisted molecular beam epitaxy - 字舞流文

Study of high quality AlN layers grown on Si(111) substrates by plasma-assisted molecular beam epitaxy

E. Monroy | F. Calle | M. Sánchez-García | E. Calleja | E. Muñoz | M. Aguilar | C. Villar | F. Sanchez | A. S. Hervás