CMOS-Foundry Compatible, Broadband, and Compact Routing of Multimode SOI Waveguides

We demonstrate a CMOS-foundry compatible, broadband, and compact platform for routing multimode wavguides. Insertion loss of <0.5dB and modal cross-talk of <-15dB are measured for 90° and 180° Reff < 3µm bends supporting over 200nm of band-width.