Implications of gate-edge electric field in AlGaN/GaN high electron mobility transistors during OFF-state degradation

Abstract Gate degradation in high electron mobility transistors (HEMTs) under OFF-state stress results from the high electric field near the gate edge. We investigate the evolution of this field over time in AlGaN/GaN HEMTs upon OFF-state stress using a combination of electroluminescence (EL) microscopy and spectroscopy. EL analysis suggests that the electric field at the sites of generated surface defects is lowered after the stress, with greater lowering at higher stress temperature. The ON-state EL spectrum remains unchanged after the stress, suggesting that the regions without generated defects are not affected during the degradation. A finite element model is employed to further demonstrate the effect of surface defects on the local electric field. A correlation is observed for the spatial distribution of the EL intensity before and after the generation of leakage sites, which provides a prescreening method to predict possible early failures on a device.

[1]  David J. Smith,et al.  Reliability studies of AlGaN/GaN high electron mobility transistors , 2013 .

[2]  U. K. Mishra,et al.  Optical investigation of degradation mechanisms in AlGaN/GaN high electron mobility transistors: Generation of non-radiative recombination centers , 2012 .

[3]  Miroslav Micovic,et al.  Reliability of T‐gate AlGaN/GaN HEMTs , 2011 .

[4]  Gaudenzio Meneghesso,et al.  AlGaN/GaN-Based HEMTs Failure Physics and Reliability: Mechanisms Affecting Gate Edge and Schottky Junction , 2013, IEEE Transactions on Electron Devices.

[5]  Feng Gao,et al.  Impact of Water-Assisted Electrochemical Reactions on the OFF-State Degradation of AlGaN/GaN HEMTs , 2014, IEEE Transactions on Electron Devices.

[6]  G. Meneghesso,et al.  Analysis of the Reliability of AlGaN/GaN HEMTs Submitted to On-State Stress Based on Electroluminescence Investigation , 2013, IEEE Transactions on Device and Materials Reliability.

[7]  Martin Kuball,et al.  On the link between electroluminescence, gate current leakage, and surface defects in AlGaN/GaN high electron mobility transistors upon off-state stress , 2012 .

[8]  Feng Gao,et al.  Role of oxygen in the OFF-state degradation of AlGaN/GaN high electron mobility transistors , 2011 .

[9]  D. Floriot,et al.  Analysis of Schottky gate degradation evolution in AlGaN/GaN HEMTs during HTRB stress , 2013, Microelectron. Reliab..

[10]  James S. Speck,et al.  Influence of threading dislocation density on early degradation in AlGaN/GaN high electron mobility transistors , 2011 .

[11]  Carl V. Thompson,et al.  Evolution of structural defects associated with electrical degradation in AlGaN/GaN high electron mobility transistors , 2010 .

[12]  J. D. del Alamo,et al.  Critical Voltage for Electrical Degradation of GaN High-Electron Mobility Transistors , 2008, IEEE Electron Device Letters.

[13]  Gaudenzio Meneghesso,et al.  Degradation of AlGaN/GaN high electron mobility transistors related to hot electrons , 2012 .

[14]  Gaudenzio Meneghesso,et al.  Time-dependent degradation of AlGaN/GaN high electron mobility transistors under reverse bias , 2012 .

[15]  Jungwoo Joh,et al.  Role of stress voltage on structural degradation of GaN high-electron-mobility transistors , 2011, Microelectron. Reliab..

[16]  Tetsuya Suemitsu,et al.  Electroluminescence characterization of AlGaN/GaN high-electron-mobility transistors , 2001 .

[17]  Martin Kuball,et al.  Integrated Optical and Electrical Analysis: Identifying Location and Properties of Traps in AlGaN/GaN HEMTs During Electrical Stress , 2010, IEEE Electron Device Letters.

[18]  Tetsuya Suemitsu,et al.  Optical study of high-biased AlGaN/GaN high-electron-mobility transistors , 2002 .

[19]  Andrew G. Glen,et al.  APPL , 2001 .

[20]  Michael J. Uren,et al.  An experimental and theoretical study of the formation and microstructure of porous silicon , 1985 .

[21]  Denis Marcon,et al.  Reliability of AlGaN/GaN HEMTs: Permanent leakage current increase and output current drop , 2012, Proceedings of the 20th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA).

[22]  Feng Gao,et al.  A model for the critical voltage for electrical degradation of GaN high electron mobility transistors , 2009, 2009 Reliability of Compound Semiconductors Digest (ROCS).

[23]  Gaudenzio Meneghesso,et al.  Extensive analysis of the luminescence properties of AlGaN/GaN high electron mobility transistors , 2010 .

[24]  G. G. Stokes "J." , 1890, The New Yale Book of Quotations.

[25]  Denis Marcon,et al.  Localization of off-stress-induced damage in AlGaN/GaN high electron mobility transistors by means of low frequency 1/f noise measurements , 2013 .

[26]  Martin Kuball,et al.  Time evolution of off-state degradation of AlGaN/GaN high electron mobility transistors , 2014 .

[27]  Hadis Morkoç,et al.  Reliability of AlGaN/GaN high electron mobility transistors on low dislocation density bulk GaN substrate: Implications of surface step edges , 2013 .

[28]  G. Meneghesso,et al.  Electroluminescence and Transmission Electron Microscopy Characterization of Reverse-Biased AlGaN/GaN Devices , 2013, IEEE Transactions on Device and Materials Reliability.

[29]  Gaudenzio Meneghesso,et al.  Reliability Analysis of Permanent Degradations on AlGaN/GaN HEMTs , 2013, IEEE Transactions on Electron Devices.

[30]  Liu Lu,et al.  Field-induced defect morphology in Ni-gate AlGaN/GaN high electron mobility transistors , 2013 .

[31]  J.A. del Alamo,et al.  A Simple Current Collapse Measurement Technique for GaN High-Electron Mobility Transistors , 2008, IEEE Electron Device Letters.

[32]  Keith R. Evans,et al.  GaN Substrates for III-Nitride Devices , 2010, Proceedings of the IEEE.

[33]  Jinhyung Kim,et al.  Investigation of the effect of temperature during off-state degradation of AlGaN/GaN High Electron Mobility Transistors , 2012, Microelectron. Reliab..