Development trends of LTPS TFT LCDs for mobile applications

Full integration of digital circuits will progress with increasingly minute design rules and higher mobility in TFT devices and improvement in processes. Together with improvements in circuit design technology, the low-temperature polysilicon (LTPS) TFT LCD is expected to be one of the most promising displays for digital tools such as cellular phones and PDAs, whose future market size is expected to expand by leaps and bounds. Moreover, improvements to minimize the scattering of the Vth of adjacent TFTs will bring about the integration of an op-amp and the further full-integration of analog/digital circuits on glass substrates.

[1]  Tsutomu Yamada,et al.  Updated technology of ion implantation applicable low-temperature poly-Si TFT process , 2000, 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432).

[2]  K. Nagata IMT-2000 terminal and its requirements for device technologies , 2000, 2000 Symposium on VLSI Circuits. Digest of Technical Papers (Cat. No.00CH37103).

[3]  Tatsuya Shimoda,et al.  Investigation of Relationship between Hot Carrier Degradation and Kink Effect in Low Temperature Poly-Si TFTs , 1999 .