Compact programmable controller for a linear piezo-stepper motor

Abstract A design of a compact and low-cost programmable high-voltage pulser for a linear piezo-stepper motor, using an 8 bit reduce instruction set computers (RISC) microcontroller, a high-voltage complementary metal oxide semiconductor (HVCMOS) converter, and an adjustable three-terminal high-voltage regulator is presented. The design consists of 12 independent digital channels of high-voltage output and two-operation modes—normal and smart. The generator is applied as a controller for an approach mechanism in a scanning probe microscope. The motor shows translation of about 1 mm/min with step size of about 100 nm.

[1]  Michael Goldfarb,et al.  A Lumped Parameter Electromechanical Model for Describing the Nonlinear Behavior of Piezoelectric Actuators , 1997 .

[2]  D. W. Pohl,et al.  Sawtooth nanometer slider: A versatile low voltage piezoelectric translation device , 1987 .

[3]  G. Binnig,et al.  A low‐temperature atomic force/scanning tunneling microscope for ultrahigh vacuum , 1991 .

[4]  U. Dürig,et al.  Near‐field optical‐scanning microscopy , 1986 .

[5]  K. Besocke,et al.  An easily operable scanning tunneling microscope , 1987 .

[6]  Takaaki Ishii,et al.  A piezoelectric linear actuator formed from a multitude of bimorphs , 2004 .

[7]  O. Cheshnovsky,et al.  PHOTODETACHMENT STUDIES OF EXTENDED EXCITED STATES IN I-XEN CLUSTERS (N=1-54) , 1999 .

[8]  D. Croft,et al.  Creep, Hysteresis, and Vibration Compensation for Piezoactuators: Atomic Force Microscopy Application , 2001 .

[9]  G. Binnig,et al.  Tunneling through a controllable vacuum gap , 1982 .

[10]  D. Peale,et al.  A scanning tunneling microscope for ultrahigh vacuum atom–surface interaction studies , 1990 .

[11]  C. Newcomb,et al.  Improving the linearity of piezoelectric ceramic actuators , 1982 .

[12]  K.-W. Ng,et al.  Compact coarse approach mechanism for scanning tunneling microscope , 2001 .

[13]  Mustafa Arafa,et al.  On the Nonlinear Behavior of Piezoelectric Actuators , 2004 .

[14]  W. Denk,et al.  Optical stethoscopy: Image recording with resolution λ/20 , 1984 .

[15]  O. Cheshnovsky,et al.  A combined mass gate–energy discriminator , 1997 .

[16]  K. Herrmann,et al.  A miniaturized scanning tunneling microscope with large operation range , 1993 .

[17]  Andrew J. Fleming,et al.  Precision current and charge amplifiers for driving highly capacitive piezoelectric loads , 2003 .

[18]  C. Heiden,et al.  Simple micropositioning devices for STM , 1987 .

[19]  John A. Main,et al.  Design Impact of Piezoelectric Actuator Nonlinearities , 1997 .

[20]  C. Galassi Piezoelectric Materials: Advances in Science, Technology and Applications , 2008 .

[21]  Y. Kuk,et al.  Scanning tunneling microscope instrumentation , 1989 .