Integrated design of a linear positioning system with applications to electronic manufacturing

A high-speed, high-accuracy linear positioning system with application to electronic manufacturing is designed to satisfy four simultaneous closed-loop specifications by integrated design approach. Utilizing the three-stage convex integrated design (CID) method proposed here, the mechanical structure parameters of the linear positioning system, both the control gains and controller structure of a closed-loop controller, are uniquely determined, so that improved closed-loop system performance beyond that required by the n pre-specified closed-loop performance specifications, is acquired. The CID method is especially useful when the design problem has a small set of design variables. Experimental results show that all four performance specifications are simultaneously satisfied, which verify the effectiveness of this design.