Electric and Pyroelectric Behaviors of PbTiO3 Thin Films Formed by an Excimer Laser Ablation Technique

Ferroelectric PbTiO3 thin films have been formed on base electrodes of platinum by an ArF excimer laser ablation technique. X-ray diffraction patterns of the films show c-axis orientation with a rocking angle of 0.8°-0.5° under the cooling rate conditions of less than -75°C/min. These films exhibit ferroelectric hysteresis loops. The PbTiO3 film, formed at 550°C in O2 pressure of 100 mTorr, has a dielectric constant, coercive field and remnant polarization of 130, 280 kV/cm and 80 µC/cm2, respectively. These values are too large but they are rather similar to the values of theoretical data. Voltage responsivities of these films are 1000-1500 V/W at the frequency of 10 Hz even without poling treatment.