DESIGN CONSIDERATIONS FOR ELECTROMECHANICAL ACTUATION IN PRECISION MOTION SYSTEMS

In this paper the actuation system, often encountered high-precision motion systems, is studied. To find out the limitations of the actuation system, a integrated electromechanical model of the amplifier, actuator and mechanics is derived. This is done in a system's theory-approach, so that amplifier feedback circuit design can be tuned using loop-shaping techniques. Stability analysis is carried out for the amplifier feedback network design, including relevant uncertainties in the actuator under working conditions. The important limiting properties of the amplifier are discussed, and translated into constraints for setpoint design. Further, ideas for improvement of existing actuation systems are given.