Decoupling Control of Multi-dimensional Piezodriven Stages Based on Sandwich Model

For compensating the interactive effects and perform the target tracking control in the multi-dimensional piezo-driven stage, a hybrid decoupling control strategy based on the special sandwich model is presented in this paper. In the proposed decoupling control scheme, the coupling effects of each axis in multi-dimensional piezo-driven stages are firstly eliminated by the nonlinear coupling model. Then, the proposed control schemes based on the obtained sandwich model are developed to enable the displacement of each piezo-driven substage to track the modified reference signal. Besides, the robust controller is design to perform the tracking and decoupling control in the piezo-driven. Finally, the control experimental results on the X-Y piezo-driven stages are also presented to verify the proposed hybrid decoupling control scheme.

[1]  Tan Yonghong.  Identification and control of piezoceramic actuator using nonsmooth sandwich model , 2013 .

[2]  Jozef Vörös,et al.  Parameter identification of Wiener systems with multisegment piecewise-linear nonlinearities , 2007, Syst. Control. Lett..

[3]  Guoxiao Guo,et al.  Feedforward decoupling control design for dual-actuator system in hard disk drives , 2004, IEEE Transactions on Magnetics.

[4]  Qingsong Xu,et al.  Dahl Model-Based Hysteresis Compensation and Precise Positioning Control of an XY Parallel Micromanipulator With Piezoelectric Actuation , 2010 .

[5]  Xiulan Bao,et al.  Master and slave control of a dual-stage for precision positioning , 2008, 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems.

[6]  Gang Tao,et al.  Adaptive control of plants with unknown hystereses , 1995 .

[7]  Klaus Janschek,et al.  Recursive Identification of Micropositioning Stage Based on Sandwich Model With Hysteresis , 2017, IEEE Transactions on Control Systems Technology.

[8]  C. Su,et al.  An Analytical Generalized Prandtl–Ishlinskii Model Inversion for Hysteresis Compensation in Micropositioning Control , 2011, IEEE/ASME Transactions on Mechatronics.

[9]  Masoud Tahani,et al.  Higher-order coupled and uncoupled analyses of free edge effect in piezoelectric laminates under mechanical loadings , 2009 .

[10]  Qingsong Xu,et al.  Development and Assessment of a Novel Decoupled XY Parallel Micropositioning Platform , 2010, IEEE/ASME Transactions on Mechatronics.

[11]  Yonghong Tan,et al.  Identification of sandwich systems with hysteresis based on two-stage method , 2010, Proceedings of the 2010 International Conference on Modelling, Identification and Control.

[12]  Bintang Yang,et al.  A new methodology for developing flexure-hinged displacement amplifiers with micro-vibration suppression for a giant magnetostrictive micro drive system , 2017 .

[13]  U-Xuan Tan,et al.  A Low-Cost Flexure-Based Handheld Mechanism for Micromanipulation , 2011, IEEE/ASME Transactions on Mechatronics.

[14]  Yonghong Tan,et al.  Nonlinear Modeling and Decoupling Control of XY Micropositioning Stages With Piezoelectric Actuators , 2013, IEEE/ASME Transactions on Mechatronics.

[15]  Jingyan Dong,et al.  Development of a High-Bandwidth XY Nanopositioning Stage for High-Rate Micro-/Nanomanufacturing , 2011, IEEE/ASME Transactions on Mechatronics.

[16]  Qingze Zou,et al.  Iterative control of dynamics-coupling-caused errors in piezoscanners during high-speed AFM operation , 2005, IEEE Transactions on Control Systems Technology.