论文信息 - A front end CMOS circuit for a full-bridge piezoresistive pressure sensor

A front end CMOS circuit for a full-bridge piezoresistive pressure sensor

Abstract A CMOS circuit with compensation of the temperature dependency of sensitivity, adjustable voltage excitation and adjustable full-scale output for full-bridge piezoresistive pressure sensors is designed. The circuit requires six external resistors; two of these are used to adjust the temperature coefficient of the excitation voltage to the sensor, two to adjust the level of the excitation voltage and two to adjust the level of the full-scale output. The concept has been tested on SensoNor's SP 81 pressure family. The results show that the sensitivity deviation is reduced from approximately 18 to −0.78% in the temperature range −40 to +100 °C, and the temperature coefficient of sensitivity is reduced from approximately −2300 to −53 ppm/°C using a straight-line approximation.

Henrik Jakobsen | Per Ohlckers | Jakob Gakkestad

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