Design and implementation of a fully-decoupled tuning fork (FDTF) MEMS vibratory gyroscope for robustness improvement

This study demonstrates the structural design and implementation of a single-axis MEMS vibratory rate gyroscope for the robustness improvement. As in Fig.1, features of this study are: (1) the employment of the fully-decoupled mechanism minimizes the mechanical cross-coupling between the drive-mode and the sense-mode; (2) the tuning fork structure combined with differential sensing architecture increases the resistance against external vibrations; (3) a compact structural design consists of the structurally forced (by rigid lever mechanism) anti-phase sense-mode and the linear-coupled anti-phase drive-mode. Preliminary results show a reduced coupling signal of near 500°/s, and the vibration resistances along different directions are also investigated. Moreover, the angular rate sensitivity is 17.7μV/°/s, which can be further improved using a mode-matched operation.

[1]  Roger T. Howe,et al.  Performance comparison of integrated z-axis frame microgyroscopes , 2003, The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE.

[2]  F. Ayazi,et al.  A 0.1°/HR bias drift electronically matched tuning fork microgyroscope , 2008, 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems.

[3]  S. Sherman,et al.  Single-chip surface-micromachined integrated gyroscope with 50/spl deg//hour root Allan variance , 2002, 2002 IEEE International Solid-State Circuits Conference. Digest of Technical Papers (Cat. No.02CH37315).

[4]  D. Horsley,et al.  Single chip process for sensors implementation, integration, and condition monitoring , 2013, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).

[5]  A. Kourepenis,et al.  Error sources in in-plane silicon tuning-fork MEMS gyroscopes , 2006, Journal of Microelectromechanical Systems.

[6]  George T Schmidt,et al.  INS/GPS Technology Trends , 2010 .

[7]  T. Akin,et al.  A single-crystal silicon symmetrical and decoupled MEMS gyroscope on an insulating substrate , 2005, Journal of Microelectromechanical Systems.

[8]  A.A. Trusov,et al.  Gyroscope architecture with structurally forced anti-phase drive-mode and linearly coupled anti-phase sense-mode , 2009, TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference.

[9]  L. Aaltonen,et al.  Zero-Rate Output and Quadrature Compensation in Vibratory MEMS Gyroscopes , 2007, IEEE Sensors Journal.