Proposal of a speed sensor based on FGMOS for a MEMS rotatory micromotor

This paper shows a proposal design of how to use a Floating-gate MOS transistor (FGMOS) for estimation of the rotational speed of a MEMS rotatory micromotor. The design is based on the 0.5 micron CMOS technology. With simulations carried out in SPICE, it is shown how the change in the capacitance between the control gate and the floating gate can be used to estimate the rotational speed of a micromotor.

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