One-channel time reversal focusing of ultra-high frequency acoustic waves on a MEMS

This Letter reports on a work performed to fabricate and characterize a silicon micro-machined cavity dedicated to micro-resolution Ultra-High Frequency imaging in microfluidics and microbiological applications using one-channel time reversal. Time reversal provides the means to spatially and temporally localize elastic energy on a receiver. Here, the arrays of zinc oxide micro transducers are coupled with a 400  μm thick silicon wafer containing micromachined structures for acoustical field confinement. Characterization of the diffused acoustic field and time-reversal retro-focusing are reported. The transducers are wideband in the 0.2–2 GHz range with a central frequency of 0.9 GHz.

[1]  T. Huang,et al.  A sound approach to advancing healthcare systems: the future of biomedical acoustics , 2022, Nature Communications.

[2]  Jiuhui Wu,et al.  Acoustic focusing and imaging via phononic crystal and acoustic metamaterials , 2022, Journal of Applied Physics.

[3]  S. Harmand,et al.  Nanofluids dynamic viscosity evolution using high-frequency acoustic waves: Application applied for droplet evaporation , 2021 .

[4]  S. Harmand,et al.  Fabrication and Optimization of High Frequency ZnO Transducers for Both Longitudinal and Shear Emission: Application of Viscosity Measurement using Ultrasound , 2020 .

[5]  O. Bou Matar,et al.  Local damage detection by nonlinear coda wave interferometry combined with time reversal. , 2020, Ultrasonics.

[6]  Maxence Bigerelle,et al.  Evaporation of Binary Sessile Drops: Infrared and Acoustic Methods To Track Alcohol Concentration at the Interface and on the Surface. , 2016, Langmuir : the ACS journal of surfaces and colloids.

[7]  Roel Snieder,et al.  Improving spatio-temporal focusing and source reconstruction through deconvolution , 2015 .

[8]  Xingzhong Zhao,et al.  Lab-on-a-chip for high frequency acoustic characterization , 2013 .

[9]  R. Snieder,et al.  Improving time reversal focusing through deconvolution: 20 questions , 2012 .

[10]  M. Fink,et al.  Tunable time-reversal cavity for high-pressure ultrasonic pulses generation: A tradeoff between transmission and time compression , 2012 .

[11]  O. Matar,et al.  Time reversed acoustics techniques for elastic imaging in reverberant and nonreverberant media: An experimental study of the chaotic cavity transducer concept , 2011 .

[12]  Mathias Fink,et al.  Focusing and amplification of electromagnetic waves by time-reversal in an leaky reverberation chamber , 2009, 2009 IEEE Antennas and Propagation Society International Symposium.

[13]  Alexander Sutin,et al.  The time reversed elastic nonlinearity diagnostic applied to evaluation of diffusion bonds , 2008 .

[14]  Serge Dos Santos,et al.  A two-dimensional pseudospectral model for time reversal and nonlinear elastic wave spectroscopy. , 2007, The Journal of the Acoustical Society of America.

[15]  Alexander Sutin,et al.  Single-channel time reversal in elastic solids , 2004 .

[16]  G. Lerosey,et al.  Telecommunication in a disordered environment with iterative time reversal , 2004 .

[17]  Mathias Fink,et al.  Time reversal kaleidoscope: A smart transducer for three-dimensional ultrasonic imaging , 2004 .

[18]  Chun H. Wang,et al.  A synthetic time-reversal imaging method for structural health monitoring , 2004 .

[19]  M. Fink,et al.  Real-time focusing using an ultrasonic one channel time-reversal mirror coupled to a solid cavity , 2002 .

[20]  M. Hoffmann,et al.  Bulk silicon micromachining for MEMS in optical communication systems , 2002 .

[21]  M. Fink,et al.  Generation of very high pressure pulses with 1-bit time reversal in a solid waveguide , 2001 .

[22]  J L Thomas,et al.  Optimal focusing by spatio-temporal inverse filter. I. Basic principles. , 2001, The Journal of the Acoustical Society of America.

[23]  J L Thomas,et al.  Time reversal and the inverse filter. , 2000, The Journal of the Acoustical Society of America.

[24]  Mathias Fink,et al.  Time-reversed acoustics , 2000 .

[25]  M. Fink,et al.  Ultrasonic pulse compression with one-bit time reversal through multiple scattering , 1999 .

[26]  Mathias Fink,et al.  One-channel time-reversal in chaotic cavities: Experimental results , 1999 .

[27]  Mathias Fink,et al.  Time-reversal in an ultrasonic waveguide , 1997 .

[28]  M. Fink,et al.  Time reversal processing in ultrasonic nondestructive testing , 1995, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[29]  M. Fink,et al.  Time reversal of ultrasonic fields. Il. Experimental results , 1992, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[30]  C. S. Clay,et al.  Reproducibility of signal transmissions in the ocean , 1965 .