Engineering the III-V Gate Stack Properties by Optimization of the ALD Process
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Aaron Thean | Jacopo Franco | Stefan De Gendt | Marc Heyns | Nadine Collaert | Tsvetan Ivanov | Laura Nyns | A. Vais | Kathy Barla | Annelies Delabie | Frank Holsteyns | Sonja Sioncke | S. Van Elshocht | Jan Willem Maes | Michael Givens | K. Barla | A. Thean | N. Collaert | T. Ivanov | M. Heyns | J. Franco | S. Sioncke | A. Delabie | A. Vais | L. Nyns | J. Maes | Q. Xie | M. Givens | F. Tang | S. Gendt | S. Elshocht | F. Holsteyns | D. Lin | M. Ameen | D. Lin | Mahmoud Ameen | Qi Xie | Fu Tang