Integration and optimisation of a high performance RF lateral DMOS in an advanced BiCMOS technology

In this paper, we present the optimisation of a RF lateral DMOS and its integration in an advanced 0.25 /spl mu/m SiGe:C BiCMOS technology. The proposed device shows excellent characteristics; Ron is around 2.5 /spl Omega/.mm with a BVDS larger than 13 V, f/sub T/ and F/sub max/ reach 21 GHz and 40 GHz respectively. These performances fit wireless RF-power amplifier needs. Integration of such a device in a RF oriented BiCMOS process is a key issue for a SOC approach of wireless circuits.

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