High-power narrow-band tunable injection-locked KrF laser system

A high-power KrF laser system based on a wide-aperture electron-beam pumped excimer laser `GARPUN' with injection-locking from a discharge pumped narrow-band oscillator has been developed. The laser radiation spectral brightness of approximately 5 X 1014 W/cm2 srad cm-1 with narrow linewidth approximately 0.1 cm-1 tunable near (lambda) equals 248 nm, and the output peak power of approximately 1 GW have been obtained.