Simple method to calibrate phase modulators for use in dynamic phase-shifting interferometry

A simple method is proposed to calibrate phase shift modu- lators used in phase-shifting interferometry for algorithms requiring p/2 phase shifts. The method provides a convenient in situ calibration with- out any change in experimental setup for a wide range of phase shift modulators such as piezoelectric translators (PZTs), Pockels cells, etc. The calibration by the proposed method is fast, efficient, and accurate. The performance of the new method is demonstrated by calibration of a Pockels cell in a phase-stepped speckle interferometer. The results ob- tained from the new calibration method are found to agree to within 2% of those from a previously described method for the calibration of non- linear phase modulators. © 2004 Society of Photo-Optical Instrumentation Engi- neers. (DOI: 10.1117/1.1810532)

[1]  K. Creath V Phase-Measurement Interferometry Techniques , 1988 .

[2]  C. R. Coggrave,et al.  Real-time visualisation of deformation fields using speckle interferometry and temporal phase unwrapping , 2004 .

[3]  Jonathan M. Huntley,et al.  Convenient method for calibrating nonlinear phase modulators for use in phase shifting interferometry , 1998 .

[4]  J. Schwider,et al.  Digital wave-front measuring interferometry: some systematic error sources. , 1983, Applied optics.

[5]  P. Carré Installation et utilisation du comparateur photoélectrique et interférentiel du Bureau International des Poids et Mesures , 1966 .

[6]  A J Moore,et al.  Measurement of complex surface deformation by high-speed dynamic phase-stepped digital speckle pattern interferometry. , 2000, Optics letters.

[7]  Charles Joenathan,et al.  Phase-measuring fiber optic electronic speckle pattern interferometer: phase step calibration and phase drift minimization , 1992 .

[8]  B. Bhushan,et al.  An Optical Profilometer for Surface Characterization of Magnetic Media , 1984 .

[9]  K. Creath Phase-Shifting Speckle Interferometry , 1985, Optics & Photonics.

[10]  T. Eiju,et al.  Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm. , 1987, Applied optics.

[11]  Hans J. Tiziani,et al.  Heterodyne temporal speckle-pattern interferometry. , 2000 .

[12]  G. H. Kaufmann,et al.  Phase-shifted dynamic speckle pattern interferometry at 1 kHz. , 1999, Applied optics.

[13]  Y Surrel,et al.  Design of algorithms for phase measurements by the use of phase stepping. , 1996, Applied optics.

[14]  P. Hariharan Phase-shifting interferometry: minimization of systematic errors , 2000 .

[15]  Hedser H. van Brug Phase-step calibration for phase-stepped interferometry , 1999 .

[16]  J C Wyant,et al.  Phase shifter calibration in phase-shifting interferometry. , 1985, Applied optics.

[17]  K. Jambunathan,et al.  Semi-automatic phase shift calibration using digital speckle pattern interferometry , 1995 .