A Large-Displacement and Decoupled XYZ Flexure Parallel Mechanism for Micromanipulation

This paper studies the low-mobility XYZ flexure parallel mechanisms (FPM)s with decoupled kinematics structure, and enumerates the possible structures with consideration of actuation, manufacturing and available joints. A 3-PPP structure with the three decoupled translational motions and a workspace of more than 1 mm times 1 mm times 1 mm is designed as an example. Dimension optimization based on pseudo-rigid-body model is conducted. The experiments verify design of the proposed decoupled and large-displacement ATZ-FPM

[1]  Seung-Woo Kim,et al.  An ultraprecision stage for alignment of wafers in advanced microlithography , 1997 .

[2]  Arianna Menciassi,et al.  Force feedback-based microinstrument for measuring tissue properties and pulse in microsurgery , 2001, Proceedings 2001 ICRA. IEEE International Conference on Robotics and Automation (Cat. No.01CH37164).

[3]  S H Chang,et al.  An ultra-precision XYtheta(Z) piezo-micropositioner. I. Design and analysis. , 1999, IEEE transactions on ultrasonics, ferroelectrics, and frequency control.

[4]  Kee S. Moon,et al.  Optimal design of a flexure hinge based XYφ wafer stage , 1997 .

[5]  J. Paros.  How to design flexure hinges , 1965 .

[6]  John E. McInroy,et al.  Design and control of flexure jointed hexapods , 2000, IEEE Trans. Robotics Autom..

[7]  Feng Gao,et al.  On the design of 6-DOF parallel micro-motion manipulators , 2001, Proceedings 2001 IEEE/RSJ International Conference on Intelligent Robots and Systems. Expanding the Societal Role of Robotics in the the Next Millennium (Cat. No.01CH37180).

[8]  Gregory Walsh,et al.  Kinematics of a novel three DOF translational platform , 1996, Proceedings of IEEE International Conference on Robotics and Automation.

[9]  Qingsong Xu,et al.  Kinematic Design of a Novel 3-DOF Compliant Parallel Manipulator for Nanomanipulation , 2005, AIM 2005.

[10]  Shuo-Hung Chang,et al.  An Ultra-Precision XYθZ Piezo-Micropositioner Part I: Design and Analysis , 1999 .

[11]  Reymond Clavel,et al.  Study of the sources of inaccuracy of a 3 DOF flexure hinge-based parallel manipulator , 2004, IEEE International Conference on Robotics and Automation, 2004. Proceedings. ICRA '04. 2004.

[12]  J. M. Paros,et al.  Flexure Pivots to Replace Knife Edge and Ball Bearing , 1965 .

[13]  Tatsuo Arai,et al.  Development of 3 DOF micro finger , 1996, Proceedings of IEEE/RSJ International Conference on Intelligent Robots and Systems. IROS '96.

[14]  Il Hong Suh,et al.  Design and experiment of a 3 DOF parallel micro-mechanism utilizing flexure hinges , 2002, Proceedings 2002 IEEE International Conference on Robotics and Automation (Cat. No.02CH37292).