Fabrication of micro/nano fluidic channels by nanoimprint lithography and bonding using SU-8

Polymer-based micro/nano fluidic devices are becoming increasingly important for biological applications and fluidic control. In this article, we report and demonstrate a novel fabrication process for micro/nano fluidic channels based on nanoimprint lithography (NIL) and bonding using SU-8, which is an excellent material for micro/nano fluidics application due to its good chemical stability, bio-compatibility and optical properties. Bonding pressure and temperature were found to be essential to the bonding strength and channel profile control. This fabrication technique has great potential for low-cost mass production of SU-8 based micro/nano fluidic devices.

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