마찰력 및 리플력 추정을 통한 X-Y 축 리니어 모터의 비선형 적응제어

The linear motors are easily affected by load disturbance, force ripple, friction, and parameter variations because there is no mechanical transmission to reduce the effects of model uncertainties and external disturbance. For high-speed/high-accuracy position control of a linear-motor-driven X-Y table, a nonlinear adaptive controller including a cross-coupling algorithm is designed in this paper, where the nonlinear effects such as friction and force ripple are estimated and compensated. A cross-coupling algorithm is adopted to reduce the contour error of the two-axial system. The proposed controller is evaluated through the computer simulations and its performance demonstrates the effectiveness of the proposed controller.