Calibration of Capacitance Diaphragm Gauges with 1333 Pa full scale by Direct Comparison to Resonant Silicon Gauge and Static Expansion System

Two capacitance diaphragm gauges (CDGs) with 1333 Pa full scale, with a heated sensor head and an unheated one, respectively, were calibrated by three different methods; direct comparison to a resonant silicon gauge calibrated by a pressure balance, direct comparison to a CDG with 133 Pa full scale calibrated by a static expansion method, and the static expansion method. The calibration results of the three calibration methods show good agreement within their claimed uncertainties. Calibrated higher pressure points of CDGs by the pressure balance and lower pressure ones by the static expansion system are linearly interpolated within the calibrated uncertainty. Here, compensation of the thermal transpiration effect is important when a CDG is used with a heated sensor head.

[1]  T. Takaishi,et al.  Thermal transpiration effect of hydrogen, rare gases and methane , 1963 .

[2]  W. Jitschin,et al.  Pressures in the high and medium vacuum range generated by a series expansion standard , 1990 .

[3]  Tj Thompson,et al.  Thermal transpiration correction in capacitance manometers , 1983 .

[4]  C G Rendle,et al.  New absolute pressure standard in the range 1 Pa to 7 kPa , 1999 .

[5]  A. Miiller,et al.  Development of a new high-stability transfer standard based on resonant silicon gauges for the range 100 Pa to 130 kPa , 2007 .

[6]  H. Yoshida,et al.  Compensation of Thermal Transpiration Effect for Pressure Measurements by Capacitance Diaphragm Gauge , 2010 .

[7]  K. Jousten,et al.  Reduction of the uncertainty of the PTB vacuum pressure scale by a new large area non-rotating piston gauge , 2009 .

[8]  K. Chung,et al.  Measurement uncertainties for vacuum standards at Korea Research Institute of Standards and Science , 2006 .

[9]  A. Miiller.  Measurement performance of high-accuracy low-pressure transducers , 1999 .

[10]  J. Šetina.  New approach to corrections for thermal transpiration effects in capacitance diaphragm gauges , 1999 .

[11]  L. Marzola,et al.  Primary pressure measurements down to 10−6 Pa , 1988 .

[12]  R. Hyland,et al.  Ultrasonic manometers for low and medium vacua under development at the National Bureau of Standards , 1977 .

[13]  K. Jousten,et al.  The uncertainties of calibration pressures at PTB , 1993 .