Leak-tight piezoelectric microvalve for high-pressure gas micropropulsion
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[1] Wolfgang Benecke,et al. Electromagnetically driven microvalve fabricated in silicon , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
[2] Helmut Seidel,et al. A silicon microvalve with combined electromagnetic/electrostatic actuation , 1993 .
[3] Masayoshi Esashi,et al. Normally closed microvalve and mircopump fabricated on a silicon wafer , 1989 .
[4] Juergen Mueller. Thruster Options for Microspacecraft : A Review and Evaluation of Existing Hardware and Emerging Technologies , 1997 .
[5] B. Guldimann,et al. Electrostatically actuated gas microvalve based on a Ta-Si-N membrane , 2001, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090).
[6] Andrew D. Ketsdever,et al. Review and Applicability Assessment of MEMS-Based Microvalve Technologies for Microspacecraft Propulsion , 2000 .
[7] Juergen Mueller,et al. A Review and Applicability Assessment of MEMS Based Microvalve Technologies for Microspacecraft Propulsions , 1999 .
[8] Masayoshi Esashi,et al. Normally close microvalve and micropump fabricated on a silicon wafer , 1989, IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'.
[9] Eui-Hyeok Yang,et al. JPL micro-thrust propulsion activities , 2002 .
[10] Hiroki Kuwano,et al. Electromagetically driven microvalve , 1995 .
[11] S.D. Umans,et al. An electrostatic, on/off microvalve designed for gas fuel delivery for the MIT microengine , 2004, Journal of Microelectromechanical Systems.
[12] Jay M. Khodadadi,et al. Oscillatory Fluid Flow Through a Porous Medium Channel Bounded by Two Impermeable Parallel Plates , 1991 .
[13] M. Kohl,et al. Stress-optimised shape memory microvalves , 1997, Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.
[14] M. Shikida,et al. Electrostatically driven gas valve with high conductance , 1994 .
[15] Juergen Mueller,et al. Thruster Optins for Microspacecraft: A Review and Evaluation of Existing Hardware and Emerging Technologies , 1997 .
[16] Roland Zengerle,et al. A normally-closed, bimetallically actuated 3-way microvalve for pneumatic applications , 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.
[17] P. W. Barth,et al. Silicon Microvalves For Gas Flow Control , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.