Enhanced signal-to-noise ratio in pristine, suspended carbon nanotube gas sensors

Abstract We present hysteresis-free, suspended carbon nanotube gas sensors that have been fabricated with a dry transfer technique. By avoiding process contamination and oxide charge traps, we eliminate the long-term baseline drift associated with charge-trapping that is commonly observed in conventional substrate-bound gas sensors under constant bias conditions. Long-term noise measurements on the suspended devices show that the low-frequency flicker noise attributed to charge trapping is also strongly reduced compared to on-substrate devices. Correspondingly, the average signal-to-noise ratio improves by 9 times compared to the substrate-bound, top-down contacted carbon nanotube gas sensors on a SiO2 substrate.

[1]  C. Hierold,et al.  Process control monitors for individual single-walled carbon nanotube transistor fabrication processes , 2013, 2013 IEEE International Conference on Microelectronic Test Structures (ICMTS).

[2]  C. Hierold,et al.  Hysteresis-free operation of suspended carbon nanotube transistors. , 2010, Nature nanotechnology.

[3]  C. Hierold,et al.  Encapsulation of electrical contacts for suspended single‐walled carbon nanotubes by atomic layer deposition , 2010 .

[4]  Philip G. Collins,et al.  1/f noise in carbon nanotubes , 2000 .

[5]  C. Hierold,et al.  Signal-to-noise ratio in carbon nanotube electromechanical piezoresistive sensors. , 2010, Nano letters.

[6]  N. Myung,et al.  Recent progress in carbon nanotube-based gas sensors , 2008, Nanotechnology.

[7]  Richard Martel,et al.  Controlling doping and carrier injection in carbon nanotube transistors , 2002 .

[8]  Cees Dekker,et al.  Identifying the mechanism of biosensing with carbon nanotube transistors. , 2008, Nano letters.

[9]  Suspended and non‐suspended carbon nanotube transistors for NO2 sensing – A qualitative comparison , 2008 .

[10]  Phaedon Avouris,et al.  Low-frequency current fluctuations in individual semiconducting single-wall carbon nanotubes. , 2006, Nano letters.

[11]  Hongjie Dai,et al.  Ab initio study of CNT NO2 gas sensor , 2004 .

[12]  Lukas Durrer,et al.  Sensing NO2 with individual suspended single-walled carbon nanotubes , 2008 .

[13]  S. Tiwari,et al.  Localized charge trapping due to adsorption in nanotube field-effect transistor and its field-mediated transport , 2006 .

[14]  Phase Transitions of Adsorbed Atoms on the Surface of a Carbon Nanotube , 2009, Science.

[15]  R. Riek,et al.  Narrowing SWNT diameter distribution using size-separated ferritin-based Fe catalysts , 2009, Nanotechnology.

[16]  C. Hierold,et al.  Suspended CNT-FET piezoresistive strain gauges: Chirality assignment and quantitative analysis , 2013, 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS).

[17]  F. N. Hooge,et al.  1/f noise , 1976 .

[18]  W. Haensch,et al.  High-density integration of carbon nanotubes via chemical self-assembly. , 2012, Nature nanotechnology.

[19]  S. Honda,et al.  Adsorption Kinetics of NO2 on Single-Walled Carbon Nanotube Thin-Film Sensor , 2008 .

[20]  Christofer Hierold,et al.  Ultra-low power operation of self-heated, suspended carbon nanotube gas sensors , 2013 .

[21]  Qian Wang,et al.  Suspended carbon nanotube quantum wires with two gates. , 2005, Small.

[22]  Hysteresis reduction and measurement range enhancement of carbon nanotube based NO2 gas sensors by pulsed gate voltages , 2009 .

[23]  Kong,et al.  Nanotube molecular wires as chemical sensors , 2000, Science.

[24]  J. D. Winefordner,et al.  A review and tutorial discussion of noise and signal-to-noise ratios in analytical spectrometry—I. Fundamental principles of signal-to-noise ratios , 1978 .

[25]  Electrical initialization to erase history in hysteretic carbon nanotube transistors for sensing applications , 2010 .

[26]  J. Tersoff,et al.  Low-frequency noise in nanoscale ballistic transistors. , 2007, Nano letters.

[27]  M. Shim,et al.  DC modeling and the source of flicker noise in passivated carbon nanotube transistors , 2010, Nanotechnology.

[28]  The role of pH in the density control of ferritin-based catalyst nanoparticles towards scalable single-walled carbon nanotube growth , 2011 .

[29]  P. Avouris,et al.  Impact of oxide substrate on electrical and optical properties of carbon nanotube devices , 2007 .

[30]  H. Tuinhout,et al.  Very low frequency noise characterization of semiconductor devices using DC parameter analyzers , 2012, 2012 IEEE International Conference on Microelectronic Test Structures.

[31]  Wei Tang,et al.  A high quality factor carbon nanotube mechanical resonator at 39 GHz. , 2012, Nano letters.

[32]  M. Muoth,et al.  Transfer of carbon nanotubes onto microactuators for hysteresis-free transistors at low thermal budget , 2012, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS).

[33]  S. Ilani,et al.  Realization of pristine and locally tunable one-dimensional electron systems in carbon nanotubes. , 2013, Nature nanotechnology.

[34]  Ophir Vermesh,et al.  Hysteresis caused by water molecules in carbon nanotube field-effect transistors , 2003 .

[35]  Yu-Ming Lin,et al.  1/f Noise in Carbon Nanotube Devices—On the Impact of Contacts and Device Geometry , 2007, IEEE Transactions on Nanotechnology.

[36]  Qian Wang,et al.  Toward Large Arrays of Multiplex Functionalized Carbon Nanotube Sensors for Highly Sensitive and Selective Molecular Detection. , 2003, Nano letters.

[37]  Christofer Hierold,et al.  Sub-ppm NO2 detection by Al2O3 contact passivated carbon nanotube field effect transistors , 2009 .

[38]  M. Muoth,et al.  Hysteresis-free, suspended pristine carbon nanotube gas sensors , 2013, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).

[39]  Christofer Hierold,et al.  Reduction of gate hysteresis above ambient temperature via ambipolar pulsed gate sweeps in carbon nanotube field effect transistors for sensor applications , 2010 .

[40]  J. Kevek,et al.  Origins of charge noise in carbon nanotube field-effect transistor biosensors. , 2012, Nano letters.

[41]  C. Hierold,et al.  Long term investigations of carbon nanotube transistors encapsulated by atomic-layer-deposited Al2O3 for sensor applications , 2009, Nanotechnology.

[42]  C. Hierold,et al.  Pulsed gate sweep strategies for hysteresis reduction in carbon nanotube transistors for low concentration NO2 gas detection , 2010, Nanotechnology.

[43]  M. Lundstrom,et al.  Self-Aligned Ballistic Molecular Transistors and Electrically Parallel Nanotube Arrays , 2004, cond-mat/0406494.

[44]  Cees Dekker,et al.  Optimizing the signal-to-noise ratio for biosensing with carbon nanotube transistors. , 2009, Nano letters.