Effect of secondary electron emission on the plasma sheath

In this experiment, plasma sheath potential profiles are measured over boron nitride walls in argon plasma and the effect of secondary electron emission is observed. Results are compared to a kinetic model. Plasmas are generated with a number density of 3 × 1012 m−3 at a pressure of 10−4 Torr-Ar, with a 1%–16% fraction of energetic primary electrons. The sheath potential profile at the surface of each sample is measured with emissive probes. The electron number densities and temperatures are measured in the bulk plasma with a planar Langmuir probe. The plasma is non-Maxwellian, with isotropic and directed energetic electron populations from 50 to 200 eV and hot and cold Maxwellian populations from 3.6 to 6.4 eV and 0.3 to 1.3 eV, respectively. Plasma Debye lengths range from 4 to 7 mm and the ion-neutral mean free path is 0.8 m. Sheath thicknesses range from 20 to 50 mm, with the smaller thickness occurring near the critical secondary electron emission yield of the wall material. Measured floating potenti...

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