An embedded gate graphene field effect transistor with natural Al oxidization dielectrics and its application to frequency doubler

A high efficiency frequency doubler is realized based on a single embedded gate (EG) graphene field effect transistor (GFET) with natural Al oxidation dielectrics. Due to elimination of the step of depositing gate dielectrics, the fabrication process of the EG-GFET is improved compared to conventional EG-GFETs. The capacitive efficiency of the EG-GFET is improved up to 80 times compared to the conventional silicon back gate (BG) GFET with 300 nm thick SiO2,which is higher than that of most conventional EG-GFETs. Thanks to the high capacitive efficiency, the conversion gain of the frequency doubler is 14 times higher than that of the BG-GFET based frequency doubler.

[1]  Fengnian Xia,et al.  Graphene Electronics: Materials, Devices, and Circuits , 2013, Proceedings of the IEEE.

[2]  Yuan-Fu Chen,et al.  Observation of tunable electrical bandgap in large-area twisted bilayer graphene synthesized by chemical vapor deposition , 2015, Scientific Reports.

[3]  Jing Kong,et al.  Gigahertz ambipolar frequency multiplier based on CVD graphene , 2010, 2010 International Electron Devices Meeting.

[4]  Kazuhito Tsukagoshi,et al.  Resistance modulation of multilayer graphene controlled by the gate electric field , 2010 .

[5]  Dong Seup Lee,et al.  Delay Analysis of Graphene Field-Effect Transistors , 2011, IEEE Electron Device Letters.

[6]  Chongwu Zhou,et al.  Self-aligned fabrication of graphene RF transistors with T-shaped gate. , 2012, ACS nano.

[7]  Lianmao Peng,et al.  A high-performance top-gate graphene field-effect transistor based frequency doubler , 2010 .

[8]  Hirokazu Fukidome,et al.  High-Performance Graphene Field-Effect Transistors With Extremely Small Access Length Using Self-Aligned Source and Drain Technique , 2013, Proceedings of the IEEE.

[9]  Keith A. Jenkins,et al.  High-frequency performance of graphene field effect transistors with saturating IV-characteristics , 2011, 2011 International Electron Devices Meeting.

[10]  Fei Qi,et al.  Air-stable n-type doping of graphene from overlying Si3N4 film , 2014 .

[11]  Wang Zidong,et al.  Radio-frequency transistors from millimeter-scale graphene domains , 2014 .

[12]  Joerg Appenzeller,et al.  Graphene-based frequency tripler. , 2012, Nano letters.

[13]  Rajiv K. Kalia,et al.  DYNAMICS OF OXIDATION OF ALUMINUM NANOCLUSTERS USING VARIABLE CHARGE MOLECULAR-DYNAMICS SIMULATIONS ON PARALLEL COMPUTERS , 1999 .

[14]  Zezhao He,et al.  An ultra clean self-aligned process for high maximum oscillation frequency graphene transistors , 2014 .

[15]  Keith A. Jenkins,et al.  Multifinger Embedded T-Shaped Gate Graphene RF Transistors With High $f_{\rm MAX}/f_{T}$ Ratio , 2013, IEEE Electron Device Letters.

[16]  F. Xia,et al.  High-frequency, scaled graphene transistors on diamond-like carbon , 2011, Nature.

[17]  Wei Li,et al.  High mobility flexible graphene field-effect transistors and ambipolar radio-frequency circuits. , 2015, Nanoscale.

[18]  Henri Happy,et al.  Graphene FETs With Aluminum Bottom-Gate Electrodes and Its Natural Oxide as Dielectrics , 2015, IEEE Transactions on Electron Devices.

[19]  P. Chiu,et al.  High mobility flexible graphene field-effect transistors with self-healing gate dielectrics. , 2012, ACS nano.

[20]  Jaikwang Shin,et al.  RF performance of pre-patterned locally-embedded-back-gate graphene device , 2010, 2010 International Electron Devices Meeting.

[21]  Kazuhito Tsukagoshi,et al.  Low operating bias and matched input-output characteristics in graphene logic inverters. , 2010, Nano letters.

[22]  S. Hsu,et al.  Gigahertz flexible graphene transistors for microwave integrated circuits. , 2014, ACS nano.

[23]  Huaqiang Wu,et al.  Inverted process for graphene integrated circuits fabrication. , 2014, Nanoscale.

[24]  S. Banerjee,et al.  Realization of a high mobility dual-gated graphene field-effect transistor with Al2O3 dielectric , 2009, 0901.2901.

[25]  Beiju Huang,et al.  A Pure Frequency Tripler Based on CVD Graphene , 2016, IEEE Electron Device Letters.

[26]  Z. Zhong,et al.  Flexible and transparent all-graphene circuits for quaternary digital modulations. , 2012, Nature communications.

[27]  郭剑,et al.  Radio-frequency transistors from millimeter-scale graphene domains , 2014 .

[28]  D. Nezich,et al.  Graphene Frequency Multipliers , 2009, IEEE Electron Device Letters.

[29]  K. Shepard,et al.  Graphene field-effect transistors based on boron nitride gate dielectrics , 2010, 2010 International Electron Devices Meeting.

[30]  K. Novoselov,et al.  A roadmap for graphene , 2012, Nature.

[31]  F. Schwierz Graphene transistors. , 2010, Nature nanotechnology.

[32]  Kenneth L. Shepard,et al.  Graphene Field-Effect Transistors Based on Boron–Nitride Dielectrics , 2013, Proceedings of the IEEE.

[33]  H. Hiura,et al.  Enhanced logic performance with semiconducting bilayer graphene channels. , 2010, ACS nano.

[34]  Frank Schwierz,et al.  Graphene Transistors: Status, Prospects, and Problems , 2013, Proceedings of the IEEE.

[35]  Rajiv K. Kalia,et al.  Oxidation of aluminum nanoclusters , 2005 .