Trajectory morphing applied to epitaxial thin film growth

Several recent developments have made it possible to begin exploring in formal ways the trajectory space of epitaxial growth during molecular beam epitaxy. This paper reviews the fundamentals of trajectory morphing and presents results showing that trajectory morphing may be used to explore the trajectory space of an epitaxial thin film growth system. We have derived a simplified growth model, suitable for use in morphing, and this is also presented. are reviewed.

[1]  B. Merriman,et al.  Kinetic model for a step edge in epitaxial growth. , 1999, Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics.

[2]  S. Osher,et al.  Island dynamics and the level set method for epitaxial growth , 1999 .

[3]  D. Meyer,et al.  Nonlinear modeling, identification, and feedback control design for the modern effusion cell , 1998 .

[4]  John R. Hauser,et al.  Trajectory morphing for nonlinear systems , 1998, Proceedings of the 1998 American Control Conference. ACC (IEEE Cat. No.98CH36207).

[5]  L. Coldren,et al.  In situ monitoring and control for MBE growth of optoelectronic devices , 1997 .

[6]  T. Kailath.  Linear Systems , 1980 .