Optical properties of hydrogenated amorphous-carbon film for attenuated phase-shift mask applications
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Sampath Purushothaman | Jane M. Shaw | Alessandro C. Callegari | Harold J. Hovel | Andrew T. S. Pomerene | Edward D. Babich
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Sampath Purushothaman | Jane M. Shaw | Alessandro C. Callegari | Harold J. Hovel | Andrew T. S. Pomerene | Edward D. Babich