Optically addressable single-use microfluidic valves by laser printer lithography.

We report the design, fabrication, and characterization of practical microfluidic valves fabricated using laser printer lithography. These optofluidic valves are opened by directing optical energy from a solid-state laser, with similar power characteristics to those used in CD/DVD drives, to a spot of printed toner where localized heating melts an orifice in the polymer layer in as little as 500 ms, connecting previously isolated fluidic components or compartments. Valve functionality, response time, and laser input energy dependence of orifice size are reported for cyclo-olefin polymer (COP) and polyethylene terephthalate (PET) films. Implementation of these optofluidic valves is demonstrated on pressure-driven and centrifugal microfluidic platforms. In addition, these "one-shot" valves comprise a continuous polymer film that hermetically isolates on-chip fluid volumes within fluidic devices using low-vapor-permeability materials; we confirmed this for a period of one month. The fabrication and integration of optofluidic valves are compatible with a range of polymer microfabrication technologies and should facilitate the development of fully integrated, reconfigurable, and automated lab-on-a-chip systems, particularly when reagents must be stored on chip for extended periods, e.g. for medical diagnostic devices, lab-on-a-chip synthetic systems, or hazardous biochemical analysis platforms.

[1]  J. Ducree,et al.  Liquid recirculation in microfluidic channels by the interplay of capillary and centrifugal forces , 2009, TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference.

[2]  Yoon‐Kyoung Cho,et al.  Multifunctional microvalves control by optical illumination on nanoheaters and its application in centrifugal microfluidic devices. , 2007, Lab on a chip.

[3]  R. Crooks,et al.  Molecular Interactions between Organized, Surface-Confined Monolayers and Vapor-Phase Probe Molecules. 5. Acid-Base Interactions , 1993 .

[4]  Sol-Gel Coatings on Acoustic Wave Devices: Thin Film Characterization and Chemical Sensor Development , 1990 .

[5]  Chong H. Ahn,et al.  Institute of Physics Publishing Journal of Micromechanics and Microengineering a Review of Microvalves , 2022 .

[6]  Michael G. Roper,et al.  A fully integrated microfluidic genetic analysis system with sample-in–answer-out capability , 2006, Proceedings of the National Academy of Sciences.

[7]  N. Dahotre,et al.  Laser Fabrication and Machining of Materials , 2007 .

[8]  Alan W. Staton,et al.  Mass-Transport-Limited Electrodeposition of High-Surface-Area Coatings for Surface Acoustic Wave Sensor Technology , 1999 .

[9]  A. Ricco,et al.  Patterned adhesion of electrolessly deposited copper on poly(tetrafluoroethylene). [electron or X-ra , 1993 .

[10]  R. Crooks,et al.  Chemical class specificity using self-assembled monolayers on SAW devices , 1996 .

[11]  J R Scherer,et al.  Integrated portable genetic analysis microsystem for pathogen/infectious disease detection. , 2004, Analytical chemistry.

[12]  G. G. Stokes "J." , 1890, The New Yale Book of Quotations.

[13]  A. Ricco,et al.  Ultrahigh vacuum studies of Pd metal‐insulator‐semiconductor diode H2 sensors , 1987 .

[14]  Emanuel Carrilho,et al.  Electrophoresis microchip fabricated by a direct‐printing process with end‐channel amperometric detection , 2004, Electrophoresis.

[15]  R. C. Hughes,et al.  Liquid-solid phase transition detection with acoustic plate mode sensors: Application to icing of surfaces , 1990 .

[16]  Numrin Thaitrong,et al.  Integrated microfluidic bioprocessor for single-cell gene expression analysis , 2008, Proceedings of the National Academy of Sciences.

[17]  José Alberto Fracassi da Silva,et al.  A dry process for production of microfluidic devices based on the lamination of laser-printed polyester films. , 2003, Analytical chemistry.

[18]  S. J. Martin,et al.  Characterization of the surface area and porosity of sol-gel films using saw devices. [Silicates; surface acoustic wave (SAW)] , 1988 .

[19]  A. D. Mello Focus: Plastic fantastic? , 2002 .

[20]  Robin H. Liu,et al.  Self-contained, fully integrated biochip for sample preparation, polymerase chain reaction amplification, and DNA microarray detection. , 2004, Analytical chemistry.

[21]  Antonio J. Ricco,et al.  Sensing in liquids with SH plate mode devices , 1988, IEEE 1988 Ultrasonics Symposium Proceedings..

[22]  A J Ricco,et al.  Application of disposable plastic microfluidic device arrays with customized chemistries to multiplexed biochemical assays. , 2002, Biochemical Society transactions.

[23]  Brian N. Johnson,et al.  An integrated microfluidic device for influenza and other genetic analyses. , 2005, Lab on a chip.

[24]  L. S. Sollitt,et al.  Ice on the Moon? Science Design of the Lunar Crater Observation and Sensing Satellite (LCROSS) Mission , 2006 .

[25]  Holger Becker,et al.  It's the economy... , 2009, Lab on a chip.

[26]  C Gärtner,et al.  Polymer microfabrication methods for microfluidic analytical applications , 2000, Electrophoresis.

[27]  Stephen J. Martin,et al.  Multiple-frequency SAW devices for chemical sensing and materials characterization , 1991 .

[28]  R. C. Hughes,et al.  Kinetics of Hydrogen Adsorption and Absorption: Catalytic Gate MIS Gas Sensors on Silicon , 1989 .

[29]  Thomas W. Kenny,et al.  Micromachined Silicon-Based Analytical Microinstruments for Space Science and Planetary Exploration , 1994 .

[30]  Antonio J. Ricco,et al.  Effective utilization of acoustic wave sensor responses: simultaneous measurement of velocity and attenuation , 1989, Proceedings., IEEE Ultrasonics Symposium,.

[31]  Michael B. Sinclair,et al.  The Polychromator: A programmable MEMS diffraction grating for synthetic spectra , 2000 .

[32]  D. Beebe,et al.  Flow control with hydrogels. , 2004, Advanced drug delivery reviews.

[33]  Makoto Ishida,et al.  A MEMS microvalve with PDMS diaphragm and two-chamber configuration of thermo-pneumatic actuator for integrated blood test system on silicon , 2005 .

[34]  Yi Zhang,et al.  Catching bird flu in a droplet , 2007, Nature Medicine.

[35]  Antonio J. Ricco,et al.  Characterization of SH acoustic plate mode liquid sensors , 1989 .

[36]  L. Giovangrandi,et al.  Autonomous Genetic Analysis System to Study Space Effects on Microorganisms: Results from Orbit , 2007, TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.

[37]  Fiber optic micromirror studies of the interaction of thin copper films with an organophosphonate , 1992 .

[38]  S. J. Martin,et al.  Monitoring photo-polymerization of thin films using SH acoustic plate mode sensors , 1990 .

[39]  Govind V Kaigala,et al.  Electrically controlled microvalves to integrate microchip polymerase chain reaction and capillary electrophoresis. , 2008, Lab on a chip.

[40]  宁北芳,et al.  疟原虫var基因转换速率变化导致抗原变异[英]/Paul H, Robert P, Christodoulou Z, et al//Proc Natl Acad Sci U S A , 2005 .

[41]  Michael B. Sinclair,et al.  Diffractive optical elements for the production of synthetic spectra , 1997, Photonics West.

[42]  Kent B. Pfeifer,et al.  Surface acoustic wave sensing of VOCs in harsh chemical environments , 1993 .

[43]  S. Shoji Micro Total Analysis Systems , 1999 .

[44]  L. Basabe‐Desmonts,et al.  DEVELOPMENT OF A MICROFLUIDIC PLATFORM AND DETECTION SYSTEM FOR PLATELET FUNCTION ANALYSIS , 2008 .

[45]  Onnop Srivannavit,et al.  A light writable microfluidic "flash memory": optically addressed actuator array with latched operation for microfluidic applications. , 2008, Lab on a chip.

[46]  Antonio J. Ricco,et al.  NEW ORGANIC MATERIALS SUITABLE FOR USE IN CHEMICAL SENSOR ARRAYS , 1998 .

[47]  R. Crooks,et al.  Self-assembling monolayers on SAW devices for selective chemical detection , 1992, Technical Digest IEEE Solid-State Sensor and Actuator Workshop.

[48]  R. Crooks,et al.  Real-time analysis of chemical reactions occurring at a surface-confined organic monolayer , 1991 .

[49]  George M Whitesides,et al.  Pumping fluids in microfluidic systems using the elastic deformation of poly(dimethylsiloxane). , 2007, Lab on a chip.

[50]  G. W. Arnold,et al.  Characterization of the Copper‐Poly(tetrafluoroethylene) Interface , 1993 .

[51]  R C Anderson,et al.  A miniature integrated device for automated multistep genetic assays. , 2000, Nucleic acids research.

[52]  A. Ricco,et al.  Shape-Selectivity with Liquid Crystal and Side-Chain Liquid Crystalline Polymer SAW Sensor Interfaces , 1999 .

[53]  R. Pal,et al.  Phase change microvalve for integrated devices. , 2004, Analytical chemistry.

[54]  Ronald P. Manginell,et al.  Overview of micromachined platforms for thermal sensing and gas detection , 1997, Smart Structures.

[55]  Stephen J. Martin,et al.  Effect of surface roughness on the response of thickness-shear mode resonators in liquids , 1993 .

[56]  G. Whitesides,et al.  Simple telemedicine for developing regions: camera phones and paper-based microfluidic devices for real-time, off-site diagnosis. , 2008, Analytical chemistry.

[57]  R. E. Oosterbroek,et al.  Lab-on-a-Chip; Miniaturized Systems for (BIO)Chemical Analysis and Synthesis , 2003 .

[58]  Paul Mahacek,et al.  Flight Results from the GeneSat-1 Biological Microsatellite Mission , 2007 .

[59]  INTEGRATING MULTIPLEXED PCR WITH CE FOR DETECTING MICROORGANISMS , 2003 .

[61]  Chee Yoon Yue,et al.  CO2-laser micromachining of PMMA: the effect of polymer molecular weight , 2008 .

[62]  Abhaya K. Datye,et al.  Pore structure characterization of porous films , 1989 .

[63]  A. Kudlicki,et al.  Pharmasat: Drug dose dependence results from an autonomous microsystem-based small satellite in low earth orbit , 2010 .

[64]  Friedrich G. Bachmann,et al.  Laser welding of polymers using high-power diode lasers , 2002, SPIE LASE.

[65]  P. J. Oakley,et al.  Laser Processing in Manufacturing , 1992 .

[66]  Toshikazu Nishida,et al.  Manufacturable plastic microfluidic valves using thermal actuation. , 2009, Lab on a chip.

[67]  S. Quake,et al.  Monolithic microfabricated valves and pumps by multilayer soft lithography. , 2000, Science.

[68]  Yoon-Kyoung Cho,et al.  One-Step Pathogen Specific DNA Extraction from Whole Blood on a Centrifugal Microfluidic Device , 2007, TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.

[69]  Sensing in liquids using acoustic plate mode devices , 1987, 1987 International Electron Devices Meeting.

[70]  Dermot Diamond,et al.  Ionogel-based light-actuated valves for controlling liquid flow in micro-fluidic manifolds. , 2010, Lab on a chip.

[71]  S Elizabeth Hulme,et al.  Incorporation of prefabricated screw, pneumatic, and solenoid valves into microfluidic devices. , 2009, Lab on a chip.

[72]  Antonio J. Ricco,et al.  Plastic Microfluidic Devices for DNA and Protein Analyses , 2006 .

[73]  Marcio G von Muhlen,et al.  Teflon films for chemically-inert microfluidic valves and pumps. , 2008, Lab on a chip.

[74]  大房 健 基礎講座 電気泳動(Electrophoresis) , 2005 .

[75]  R. C. Hughes,et al.  Acoustic wave devices for sensing in liquids , 1987 .

[76]  Thin film diffusion barrier formation in PDMS microcavities , 2009, TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference.

[77]  Günter Roth,et al.  Measuring biomolecular binding events with a compact disc player device. , 2005, Angewandte Chemie.

[78]  A. Ricco,et al.  Reflectivity changes of optically-thin nickel films exposed to oxygen , 1989 .

[79]  B. D. de Grooth,et al.  Cell analysis system based on compact disk technology. , 2002, Cytometry.

[80]  Sam Bae,et al.  Monolithic Teflon membrane valves and pumps for harsh chemical and low-temperature use. , 2007, Lab on a chip.

[81]  Yi Zhang,et al.  An integrated fluorescence detection system for lab-on-a-chip applications. , 2007, Lab on a chip.

[82]  C. Brinker,et al.  Monitoring thin film properties with surface acoustic wave devices: Diffusion, surface area and pore size distribution , 1988 .

[83]  Antonio J. Ricco,et al.  Real-Time Measurements of the Gas-Phase Adsorption of n-Alkylthiol Mono- and Multilayers on Gold , 1991 .

[84]  Peng Liu,et al.  Integrated portable polymerase chain reaction-capillary electrophoresis microsystem for rapid forensic short tandem repeat typing. , 2007, Analytical chemistry.

[85]  Antonio J. Ricco,et al.  Detection of volatile organics using a surface acoustic-wave array system , 1999, Optics East.

[86]  J L West,et al.  Independent Optical Control of Microfluidic Valves Formed from Optomechanically Responsive Nanocomposite Hydrogels , 2005, Advanced materials.

[87]  Plastic Microfluidic Devices for DNA Sequencing and Protein Separations , 2001 .

[88]  Antonio J. Ricco,et al.  Determination of BET surface areas of porous thin films using surface acoustic wave devices , 1989 .

[89]  Zongyuan Chen,et al.  A disposable microfluidic cassette for DNA amplification and detection. , 2006, Lab on a chip.

[90]  Haim H Bau,et al.  An automated, pre-programmed, multiplexed, hydraulic microvalve. , 2009, Lab on a chip.

[91]  Zongyuan Chen,et al.  Thermally-actuated, phase change flow control for microfluidic systems. , 2005, Lab on a chip.

[92]  Oliver Geschke,et al.  CO(2)-laser micromachining and back-end processing for rapid production of PMMA-based microfluidic systems. , 2002, Lab on a chip.

[93]  D. Seigneurin [Cytometry]. , 2020, Annales de Pathologie.

[94]  William H. Grover,et al.  Monolithic membrane valves and diaphragm pumps for practical large-scale integration into glass microfluidic devices , 2003 .

[95]  Gordon C. Osbourn,et al.  Optimizing Chemical Sensor Array Sizes , 1999 .

[96]  David S. Ballantine,et al.  Acoustic wave sensors : theory, design, and physico-chemical applications , 1997 .

[97]  许旱峤,et al.  Kirk-Othmer Encyclopedia of Chemical Technology数据库介绍及实例 , 2007 .

[98]  A. Ricco,et al.  Peer Reviewed: Plastic Advances Microfluidic Devices , 2002 .

[99]  Minqiang Bu,et al.  The SmartBioPhone, a point of care vision under development through two European projects: OPTOLABCARD and LABONFOIL. , 2009, Lab on a chip.

[100]  Utilization of polymer viscoelastic properties in acoustic wave sensor applications , 1990, IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop.

[101]  Miss A.O. Penney (b) , 1974, The New Yale Book of Quotations.

[102]  Acoustic plate mode devices as liquid phase sensors , 1988, IEEE Technical Digest on Solid-State Sensor and Actuator Workshop.

[103]  Shuichi Takayama,et al.  Computerized microfluidic cell culture using elastomeric channels and Braille displays. , 2004, Proceedings of the National Academy of Sciences of the United States of America.

[104]  D. Diamond,et al.  Low-Cost Microfluidic Single-Use Valves and On-Board Reagent Storage using Laser-Printer Technology , 2009, 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.

[105]  Gordon C. Osbourn,et al.  Simultaneous measurement of CO/sub 2/ and humidity using a pair of SAW devices and cluster-analysis pattern recognition , 1997, International Conference on Solid-State Sensors, Actuators and Microsystems.

[106]  Daniel N. Lapedes,et al.  Yearbook of Science and Technology , 1965 .

[107]  Jing-Juan Xu,et al.  Fabrication of poly(dimethylsiloxane) microfluidic system based on masters directly printed with an office laser printer. , 2005, Journal of chromatography. A.

[108]  P. Willis,et al.  Monolithic photolithographically patterned Fluorocur PFPE membrane valves and pumps for in situ planetary exploration. , 2008, Lab on a chip.

[109]  Z. Hugh Fan,et al.  Integrating polymerase chain reaction, valving, and electrophoresis in a plastic device for bacterial detection. , 2003, Analytical chemistry.

[110]  W. Marsden I and J , 2012 .

[111]  C. Chung,et al.  Bulge formation and improvement of the polymer in CO2 laser micromachining , 2005 .

[112]  Antonio J. Ricco,et al.  Selective surface acoustic wave-based organophosphonate chemical sensor employing a self-assembled composite monolayer: A new paradigm for sensor design , 1992 .

[113]  A. Ozcan,et al.  Lensfree holographic imaging for on-chip cytometry and diagnostics. , 2009, Lab on a chip.

[114]  T. E. Zipperian,et al.  Measuring Thin Film Properties Using SAW Devices: Diffusivity and Surface Area , 1987, IEEE 1987 Ultrasonics Symposium.

[115]  Bernhard Weigl,et al.  Towards non- and minimally instrumented, microfluidics-based diagnostic devices. , 2008, Lab on a chip.

[116]  R. S. Niedbala,et al.  Oral-based diagnostics , 2007 .

[117]  C. Holding Lab on a chip , 2004, Genome Biology.

[118]  S. Quake,et al.  Dissecting biological “dark matter” with single-cell genetic analysis of rare and uncultivated TM7 microbes from the human mouth , 2007, Proceedings of the National Academy of Sciences.

[119]  J. Ducrée,et al.  Monolithic Centrifugal Microfluidic Platform for Bacteria Capture and Concentration, Lysis, Nucleic-Acid Amplification, and Real-Time Detection , 2009, 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.

[120]  Elazer R. Edelman,et al.  Adv. Drug Delivery Rev. , 1997 .

[121]  A. Ricco,et al.  Multiple-frequency surface acoustic wave devices as sensors , 1990, IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop.