Investigation of the Growth Mechanisms of a-CHx Coatings Deposited by Pulsed Reactive Magnetron Sputtering
暂无分享,去创建一个
[1] G. Dinescu,et al. OES monitoring of sequential deposition of C/W layers by PECVD/magnetron sputtering techniques , 2011 .
[2] Saša M. Miladinović,et al. Growth mechanisms involved in the synthesis of smooth and microtextured films by acetylene magnetron discharges. , 2011, Langmuir : the ACS journal of surfaces and colloids.
[3] L. P. Nielsen,et al. Optimization of the mechanical properties of magnetron sputtered diamond-like carbon coatings , 2011 .
[4] S. Tamulevičius,et al. Ion beam deposition of amorphous hydrogenated carbon films on amorphous silicon interlayer: Experiment and simulation , 2011 .
[5] D. M. Trucchi,et al. Influence of PECVD parameters on the properties of diamond-like carbon films , 2011 .
[6] D. J. Thiruvadigal,et al. Systematic study of various stages during the growth process of diamond-like carbon film by atomic force microscopy , 2011 .
[7] B. Shokri,et al. Investigation of the properties of diamond-like carbon thin films deposited by single and dual-mode plasma enhanced chemical vapor deposition , 2011 .
[8] C. Casiraghi. Effect of hydrogen on the UV Raman intensities of diamond-like carbon , 2011 .
[9] B. L. Weeks,et al. Application of dynamic scaling to the surface properties of organic thin films: Energetic materials , 2011 .
[10] P. Diggins,et al. Improved adhesion of ultra-hard carbon films on cobalt–chromium orthopaedic implant alloy , 2011, Journal of materials science. Materials in medicine.
[11] P. Maguire,et al. Acetylene–argon plasmas measured at a biased substrate electrode for diamond-like carbon deposition: I. Mass spectrometry , 2011 .
[12] C. Mahony,et al. Acetylene–argon plasmas measured at an rf-biased substrate electrode for diamond-like carbon deposition: II. Ion energy distributions , 2011 .
[13] P. Chu,et al. Corrosion behavior of DLC-coated NiTi alloy in the presence of serum proteins , 2010 .
[14] F. Habraken,et al. Morphological evolution of pulsed laser deposited ZrO2 thin films , 2010 .
[15] Saša M. Miladinović,et al. Laser desorption/ionization fourier transform mass spectrometry of thin films deposited on silicon by plasma polymerization of acetylene , 2010, Journal of the American Society for Mass Spectrometry.
[16] K. Bewilogua,et al. Preparation and comparison of a-C:H coatings using reactive sputter techniques , 2009 .
[17] J. Branco,et al. How can H content influence the tribological behaviour of W-containing DLC coatings , 2009 .
[18] J. Houska,et al. Formation and behavior of unbonded hydrogen in a-C:H of various compositions and densities , 2009 .
[19] E. Lust,et al. Diamond-like phase formation in an amorphous carbon films prepared by periodic pulsed laser deposition and laser irradiation method , 2009 .
[20] A. Czyżniewski. Preparation and characterisation of a-C and a-C:H coatings deposited by pulsed magnetron sputtering , 2009 .
[21] J. Bell,et al. Electronic states of trans-polyacetylene, poly(p-phenylene vinylene) and sp-hybridised carbon species in amorphous hydrogenated carbon probed by resonant Raman scattering , 2008, 0811.0527.
[22] S. Tzeng,et al. Influence of hydrogen on the mechanical properties and microstructure of DLC films synthesized by r.f.-PECVD , 2008 .
[23] Lihua Yu,et al. Surface morphology and growth mechanisms for sputtered amorphous silicon nitride thin films , 2008 .
[24] C. Q. Chen,et al. Microstructural control of TiC/a-C nanocomposite coatings with pulsed magnetron sputtering , 2008 .
[25] R. K. Roy,et al. Biomedical applications of diamond-like carbon coatings: a review. , 2007, Journal of biomedical materials research. Part B, Applied biomaterials.
[26] A. Yanguas-Gil,et al. Scaling behavior and mechanism of formation of SiO2 thin films grown by plasma-enhanced chemical vapor deposition , 2007 .
[27] S. Logothetidis,et al. Haemocompatibility of amorphous hydrogenated carbon thin films, optical properties and adsorption mechanisms of blood plasma proteins. , 2007, Biomolecular engineering.
[28] J. Gómez‐Herrero,et al. WSXM: a software for scanning probe microscopy and a tool for nanotechnology. , 2007, The Review of scientific instruments.
[29] J. G. Buijnsters,et al. Growth dynamics of ultrasmooth hydrogenated amorphous carbon films , 2006 .
[30] Zengtao Liu,et al. Atomic force microscopy study of growth kinetics: Scaling in TiN–TiB2 nanocomposite films on Si(1 0 0) , 2006 .
[31] Inyoung Kim,et al. Roughness evolution during a-C:H film growth in methane plasmas , 2006 .
[32] Paul K. Chu,et al. Characterization of amorphous and nanocrystalline carbon films , 2006 .
[33] J. Robertson,et al. Roughness evolution during growth of hydrogenated tetrahedral amorphous carbon , 2006 .
[34] J. Bell,et al. The Observation of sp(2) Fraction Disorder Using Dual Wavelength Raman Spectroscopy in a-C:H Films Fabricated Using an Open Inductively Coupled Plasma Reactor , 2006 .
[35] John Robertson,et al. The Ultrasmoothness of Diamond-like Carbon Surfaces , 2005, Science.
[36] J. Robertson,et al. Raman spectroscopy of hydrogenated amorphous carbons , 2005 .
[37] J. Robertson,et al. Bonding in hydrogenated diamond-like carbon by Raman spectroscopy , 2005 .
[38] I. Z. Rahman,et al. Characterization of DLC coatings deposited by rf magnetron sputtering , 2004 .
[39] J. Rabeau,et al. The role of C2 in nanocrystalline diamond growth , 2004, cond-mat/0408194.
[40] F. Talke,et al. Large area deposition of hydrogenated amorphous carbon films for optical storage disks , 2004 .
[41] R. Hauert. A review of modified DLC coatings for biological applications , 2003 .
[42] H. Naramoto,et al. Coarsening dynamics and surface instability during ion-beam-assisted growth of amorphous diamondlike carbon , 2002 .
[43] J. Robertson. Diamond-like amorphous carbon , 2002 .
[44] Stergios Logothetidis,et al. Growth kinetics of sputtered amorphous carbon thin films: composition studies and phenomenological model , 2000 .
[45] Gwo-Ching Wang,et al. Surface roughening in shadowing growth and etching in 2¿1 dimensions , 2000 .
[46] J. Robertson,et al. Interpretation of Raman spectra of disordered and amorphous carbon , 2000 .
[47] S. Ulrich,et al. Magnetron-sputtered superhard materials , 1997 .
[48] R. Cuerno,et al. Power spectrum scaling in anomalous kinetic roughening of surfaces , 1997 .
[49] J. D. Hosson,et al. Influence of atomic force microscope tip-sample interaction on the study of scaling behavior , 1997 .
[50] A. Barabasi,et al. Fractal Concepts in Surface Growth: Frontmatter , 1995 .
[51] P. I. Tamborenea,et al. A new universality class for kinetic growth: One-dimensional molecular-beam epitaxy. , 1991, Physical review letters.
[52] Zhang,et al. Dynamic scaling of growing interfaces. , 1986, Physical review letters.
[53] Fischbach,et al. Reanalysis of the Eoumltvös experiment. , 1986, Physical review letters.
[54] John A. Thornton,et al. Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings , 1974 .
[55] Hui-di Zhou,et al. A magnetron sputtering technique to prepare a-C:H films: Effect of substrate bias , 2011 .
[56] A. Barabasi,et al. Fractal concepts in surface growth , 1995 .