FABRICATION OF MICRO-COMPONENTS USING VIBRATION-ASSISTED MICRO-EDM

INTRODUCTION Due to the advances in micro-machining technology, the development of a method for measuring both the profile and dimensions of micro-components has been in strong demand. One of the available methods is a small, threedimensional profile-measuring apparatus with micro-probes. Related to this, we have investigated fabrication technologies using micro-electric discharge machining (micro-EDM) [1] for micro-probes that are used for a small, three-dimensional coordinate-measuring machine [2]. However, the machining of relatively complicated probes such as slanting probes is very difficult due to unstable machining conditions. Thus, a long time is required for probe fabrication, and it is sometimes impossible to perform normal machining due to the improper flow out of the cutting chip powder.