High power all-solid-state fourth harmonic generation of 266 nm at the pulse repetition rate of 100 kHz

14.8 W UV laser at 266 nm was reported with the extra cavity frequency quartered configuration. The fundamental frequency IR source is a high-power high-beam-quality acoustic-optic Q-switched Nd:YVO4 master-oscillator-power-amplifier laser. The type-I phase-matched LBO and type-I phase-matched BBO crystals were used as the extra-cavity frequency doubled and quartered crystal respectively. 14.8 W UV laser of 266 nm was obtained at the pulse repetition rate of 100 kHz with the conversion efficiency of 18.3% from green to UV, and the pulse duration of the UV laser was 10 ns corresponding to the pulse peak power of 14.8 kW. At 150 kHz, 11.5 W power output was obtained. The highest peak power of 21 kW was also achieved at 80 kHz with the average output power of 14.5 W.