Optical Properties of Tantalum Pentoxide Coatings Deposited Using Ion Beam Processes

Abstract Optical properties and environmental stability of tantalum pentoxide coatings have been examined. Coatings are deposited using thermal evaporation, ion-assisted deposition and reactive d.c. sputtering. Coatings deposited using ion beam processes are stable with much improved optical properties compared with conventionally evaporated coatings.

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