论文信息 - Development of ALD HfZrO x with TDEAH/TDEAZ and H2O - 字舞流文

Development of ALD HfZrO x with TDEAH/TDEAZ and H2O

T. Schram | C. Adelmann | L. Ragnarsson | R. Schreutelkamp | M. Schaekers | A. Delabie | L. Nyns | S. Takeoka | H. Tielens | S. Elshocht | L. Date | T. Nakabayashi | X. Shi