论文信息 - Method for inferring the mechanical strain of GaN-on-Si epitaxial layers using optical profilometry and finite element analysis - 字舞流文

Method for inferring the mechanical strain of GaN-on-Si epitaxial layers using optical profilometry and finite element analysis

D. Wallis | M. Dawson | B. Guilhabert | M. Strain | A. Hinz | S. Ghosh | R. Oliver | M. Toon | S. Fairclough | I. Watson | B. Spiridon