Progress in three-dimensional (3D) Li-ion microbatteries

Abstract Progressing from 2D to 3D thin-film microbattery structures represents an important paradigm shift in the development of electrochemical power sources. The development process of three-dimensional microbatteries (3D-MB) on a perforated substrate has to solve complicated technical barriers, such as insertion and deposition of a sandwich of high-capacity thin cathode and ion-conducting membrane in long (500 μm) and narrow ( 2 reversible capacity, 20 to 30 times that of a planar 2D thin-film cell with the same footprint and about twice that of semi-3D cells with pristine cathodes.

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