论文信息 - Towards embedded control for resonant scanning MEMS micromirror - 字舞流文

Towards embedded control for resonant scanning MEMS micromirror

A. A. Kuijpersa | D. Lieropa | R. H. M. Sandersa | J. Tangenbergb | H. Moddejongeb | J. W. T. Eikenbroekb | T. S. J. Lammerinkc | R. W. Wiegerinkc