论文信息 - Crystallinity of Inorganic Films Grown by Atomic Layer Deposition: Overview and General Trends - 字舞流文

Crystallinity of Inorganic Films Grown by Atomic Layer Deposition: Overview and General Trends

Mikko Ritala | Riikka L. Puurunen | M. Ritala | M. Leskelä | V. Miikkulainen | R. Puurunen | Markku Leskelä | Ville Miikkulainen

[1] S. Or,et al. Concurrent operational modes and enhanced current sensitivity in heterostructure of magnetoelectric ring and piezoelectric transformer , 2013 .

[2] Mikko Ritala,et al. Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends , 2013 .