A hydrogen gas sensor employing vertically aligned TiO2 nanotube arrays prepared by template-assisted method

Abstract Vertically aligned TiO 2 nanotube arrays for H 2 gas sensor were fabricated by using atomic layer deposition combined with anodic aluminum oxide template. Morphology and crystalline structure of the TiO 2 nanotubes were characterized, and gas sensing properties at low temperatures ( 2 nanotubes with anatase phase were synthesized to be vertically aligned on the substrate and electrically interconnected with each other. The TiO 2 nanotube sensors were operated in air environment, and the highest magnitude of the gas response ( R air / R gas ) was determined to be ∼100 toward 1000 ppm H 2 /air at 100 °C. The sensor showed a very short response time ( 2 gas against several reducing gases including NH 3 , CO, and C 2 H 5 OH.

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