Fabrication of free-standing nanoscale SiN membranes with enhanced burst pressure via improved etching process
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Hyeon-Jin Shin | I. Park | Jinho Ahn | Y. Jang | S. Wi | G. Lee | Hyeon Jin Shin | Jin-ho Ahn
暂无分享,去创建一个
Hyeon-Jin Shin | I. Park | Jinho Ahn | Y. Jang | S. Wi | G. Lee | Hyeon Jin Shin | Jin-ho Ahn