CMOS-based resonant sensors

The paper provides an overview of resonant sensors based on CMOS technology. Applications of these sensors range from inertial sensors to chemical/biochemical sensors, from atomic force microscopy to high-frequency filters. CMOS technology enables to co-integrate the resonant microstructures with necessary analog and digital circuit functions. The paper discusses CMOS-based fabrication approaches for resonant sensors, possible sensing and actuation schemes, suitable resonator materials, geometries and vibration modes. Two CMOS-based microsystems are highlighted: (i) a resonant chemical sensor and (ii) a resonant magnetic field sensor

[1]  A. Hierlemann,et al.  Complementary metal oxide semiconductor cantilever arrays on a single chip: mass-sensitive detection of volatile organic compounds. , 2002, Analytical chemistry.

[2]  O. Brand,et al.  An industrial CMOS process family adapted for the fabrication of smart silicon sensors , 2000 .

[3]  S. Huber,et al.  Electronic compass sensor , 2004, Proceedings of IEEE Sensors, 2004..

[4]  F. Ayazi,et al.  Precise release and insulation technology for vertical Hall sensors and trench-defined MEMS , 2004, Proceedings of IEEE Sensors, 2004..

[5]  Oliver Brand,et al.  Micromachined Resonant Sensors — an Overview , 1998 .

[6]  Douglas Ray Sparks,et al.  Angular rate sensor and accelerometer combined on the same micromachined CMOS chip , 1998 .

[7]  A. Hierlemann.  Integrated chemical microsensor systems in CMOS-technology , 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..

[8]  S. Sherman,et al.  Single-chip surface-micromachined integrated gyroscope with 50/spl deg//hour root Allan variance , 2002, 2002 IEEE International Solid-State Circuits Conference. Digest of Technical Papers (Cat. No.02CH37315).

[9]  G. Fedder,et al.  Fabrication, characterization, and analysis of a DRIE CMOS-MEMS gyroscope , 2003 .

[10]  O. Brand,et al.  Resonant Magnetic Field Sensor With Frequency Output , 2006, Journal of Microelectromechanical Systems.

[11]  Oliver Brand,et al.  Single-chip mechatronic microsystem for surface imaging and force response studies. , 2004, Proceedings of the National Academy of Sciences of the United States of America.

[12]  C. Vancura,et al.  Magnetically actuated complementary metal oxide semiconductor resonant cantilever gas sensor systems. , 2005, Analytical chemistry.

[13]  G. Fedder,et al.  Laminated high-aspect-ratio microstructures in a conventional CMOS process , 1996 .

[14]  Francesca Campabadal,et al.  Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry , 2005 .

[15]  L. Latorre,et al.  Micromachined CMOS magnetic field sensors with low-noise signal conditioning , 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).