论文信息 - Local electrostatic potential and process-induced boron redistribution in patterned Si/SiGe/Si heterostructures - 字舞流文

Local electrostatic potential and process-induced boron redistribution in patterned Si/SiGe/Si heterostructures

A. Ourmazd | P. Schwander | B. Heinemann | B. Tillack | H. Rücker | Wigbert D. Rau | A. Orchowski