论文信息 - Control wafer bow of InGaP on 200 mm Si by strain engineering - 字舞流文

Control wafer bow of InGaP on 200 mm Si by strain engineering

B. Wang | E. Fitzgerald | J. Michel | K. Lee | K. Lee | Shuyu Bao | R. I. Made | Cong Wang | Bing Wang | J. Michel