论文信息 - Improvements in the Passivation of P+-Si Surfaces by PECVD Silicon Carbide Films - 字舞流文

Improvements in the Passivation of P+-Si Surfaces by PECVD Silicon Carbide Films

P. Fath | R. Kopecek | D. Borchert | J. Libal | R. Petres | T. Buck | M. Vetter | R. Ferré | I. Martín